Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon

The fabrication and characterization of coplanar Barium-Strontium Titanate capacitors on Silicon are described. Micromachining was used to reduce parasitic effects stemming from the substrate, thus enhancing the performance of the device.


Published in:
Integrated Ferroelectrics, 115, 110-119
Presented at:
International Conference on Electroceramics (ICE-2009), Delhi, INDIA, Dec 13-17, 2009
Year:
2010
Keywords:
Laboratories:




 Record created 2011-12-16, last modified 2018-03-17


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