High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping
We show the first results of a linear 100-micromirror array capable of modulating the phase and amplitude of the spectral components of femtosecond lasers. Using MEMS-based reflective systems has the advantage of utilizing coatings tailored to the laser wavelength range. The innovative features of our device include a novel rotational, vertical comb-drive actuator and an X-shaped, laterally reinforced spring that prevents lateral snap-in while providing flexibility in the two degrees of freedom of each mirror, namely piston and tilt. The packaging utilizes high-density fine-pitch wire-bonding for on-chip and chip-to-PCB connectivity. For the first deployment, UV-shaped pulses will be produced to coherently control the dynamics of biomolecules.
WOS:000284996800016
2010
978-0-8194-7990-7
Proceedings of SPIE-The International Society for Optical Engineering; 7594
75940J
NON-REVIEWED
Event name | Event place | Event date |
San Francisco, CA | Jan 25-27, 2010 | |