Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.


Published in:
Journal Of Microelectromechanical Systems, 20, 15-17
Year:
2011
Publisher:
Institute of Electrical and Electronics Engineers
ISSN:
1057-7157
Keywords:
Laboratories:




 Record created 2011-12-16, last modified 2018-03-17


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