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research article

High-resolution hard-x-ray microscopy using second-order zone-plate diffraction

Yi, Jaemock
•
Chu, Yong S.
•
Chen, Yu-Tung
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2011
Journal Of Physics D-Applied Physics

Odd-order diffraction of zone plates (ZPs) is already used for x-ray microscopy but the potential offered by even-order diffraction must still be fully exploited. Width differences between lines and interline spaces transfer intensity from odd-order to even-order diffractions. Here we show that the resulting intense second-order diffraction provides a reasonable tradeoff between spatial resolution and intensity-and constitutes a viable strategy for x-ray microscopy to reach sub-20 nm resolution, in spite of the imperfections of high-aspect-ratio ZPs and of other difficulties.

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Type
research article
DOI
10.1088/0022-3727/44/23/232001
Web of Science ID

WOS:000290911400001

Author(s)
Yi, Jaemock
Chu, Yong S.
Chen, Yu-Tung
Chen, Tsung-Yu
Hwu, Y.
Margaritondo, G.  
Date Issued

2011

Published in
Journal Of Physics D-Applied Physics
Volume

44

Issue

23

Article Number

232001

Subjects

E-Beam Lithography

•

Fabrication

•

CIBM-PC

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPRX  
CIBM  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/74090
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