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research article

Floating-potential self-assembly of singe-walled carbon nanotube field effect transistors by ac-dielectrophoresis

Cao, J.  
•
Arun, A.
•
Nyffeler, C.
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2011
Microelectronic Engineering

An improved method for self-assembly fabrication of single-walled carbon nanotube (SWCNT) field effect transistors (FETs) is presented, combining the unique design of biased/floating potential electrode geometry and the technique of aligning CNTs by pre-defined trenches in "Sandwich"-like resist layers. Super-aligned SWCNT FETs bridging biased/floating potential electrode pairs with precisely controlled location can be demonstrated. Moreover, SWCNT FETs fabricated by this method exhibit excellent electrical properties, such as I-on/I-off ratio up to 10(5) and sub-threshold slope similar to 130 mV/dec. This novel technique provides a more effective and flexible way to solve the CNT assembly issue. It could also enable the fabrication of future CNT based complementary logic circuit and nano-electrical-mechanical-system (NEMS). (C) 2011 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.mee.2011.01.026
Web of Science ID

WOS:000293663400206

Author(s)
Cao, J.  
Arun, A.
Nyffeler, C.
Ionescu, A. M.  
Date Issued

2011

Published in
Microelectronic Engineering
Volume

88

Start page

2463

End page

2465

Subjects

SWCNT transistors

•

Self-assembly

•

Floating potential electrodes

•

Ac-dielectrophoresis

•

Precise positioning

•

Gate

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/73621
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