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research article
Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude
We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom. (C) 2011 American Institute of Physics. [doi:10.1063/1.3606440]
Type
research article
Web of Science ID
WOS:000293498400062
Authors
Weber, Stefan M.
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Bonacina, Luigi
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Kiselev, Denis
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Extermann, Jerome
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Lani, Sebastien
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Nenadl, Ondrej
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Wolf, Jean-Pierre
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Publication date
2011
Publisher
Published in
Volume
82
Article Number
075106
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
December 16, 2011
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