Loading...
research article
Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm
2011
Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition. (C) 2011 Optical Society of America
Type
research article
Web of Science ID
WOS:000296065700014
Authors
Chen, Tsung-Yu
•
Chen, Yu-Tung
•
Wang, Cheng-Liang
•
Kempson, Ivan M.
•
Lee, Wah-Keat
•
Chu, Yong S.
•
Hwu, Y.
•
Publication date
2011
Publisher
Published in
Volume
19
Start page
19919
End page
19924
Peer reviewed
REVIEWED
Available on Infoscience
December 16, 2011
Use this identifier to reference this record