Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)
2011
Details
Title
Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)
Author(s)
Yoshikawa, G. ; Akiyama, Terunobu ; Gautsch, Sebastian ; Vettiger, Peter ; Rohrer, H.
Conference
8th International Workshop on Nanomechanical Sensing 2011 , Dublin, Ireland, May 11-13, 2011
Date
2011
Laboratories
SAMLAB