Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)


Presented at:
8th International Workshop on Nanomechanical Sensing 2011 , Dublin, Ireland, May 11-13, 2011
Year:
2011
Laboratories:




 Record created 2011-11-28, last modified 2018-03-17


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