Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)
Yoshikawa, G.; Akiyama, Terunobu; Gautsch, Sebastian; Vettiger, Peter; Rohrer, H.
2011

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Title Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)
Author(s) Yoshikawa, G. ; Akiyama, Terunobu ; Gautsch, Sebastian ; Vettiger, Peter ; Rohrer, H.
Conference 8th International Workshop on Nanomechanical Sensing 2011 , Dublin, Ireland, May 11-13, 2011
Date 2011
Laboratories SAMLAB
Record Appears in Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
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