Infoscience

Presentation / Talk

Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS)

Yoshikawa, G.; Akiyama, Terunobu; Gautsch, Sebastian; Vettiger, Peter; Rohrer, H.
  • Presented at: 8th International Workshop on Nanomechanical Sensing 2011, Dublin, Ireland, May 11-13, 2011
  • Publication date: 2011

    Reference

    • EPFL-TALK-170405

    Record created on 2011-11-28, modified on 2016-08-09

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