Home > Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications
 

Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications

Yoshikawa, G. ; Akiyama, Terunobu ; Gautsch, Sebastian ; Vettiger, Peter[...]

Presented at:
The Japan Society of Applied Physics, The 72nd Fall Meeting , Yamagata, Japan, August 29-September 2, 2011
Year:
2011
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published



 Record created 2011-11-28, last modified 2018-03-17


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