Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications


Presented at:
The Japan Society of Applied Physics, The 72nd Fall Meeting , Yamagata, Japan, August 29-September 2, 2011
Year:
2011
Laboratories:




 Record created 2011-11-28, last modified 2018-03-17


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