Infoscience

Presentation / Talk

Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications

Yoshikawa, G.; Akiyama, Terunobu; Gautsch, Sebastian; Vettiger, Peter; Rohrer, H.
  • Presented at: The Japan Society of Applied Physics, The 72nd Fall Meeting, Yamagata, Japan, August 29-September 2, 2011
  • Publication date: 2011

    Reference

    • EPFL-TALK-170404

    Record created on 2011-11-28, modified on 2016-08-09

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