Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications
 
conference presentation

Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications

Yoshikawa, G.
•
Akiyama, Terunobu  
•
Gautsch, Sebastian  
Show more
2011
The Japan Society of Applied Physics, The 72nd Fall Meeting
  • Details
  • Metrics
Type
conference presentation
Author(s)
Yoshikawa, G.
Akiyama, Terunobu  
Gautsch, Sebastian  
Vettiger, Peter
Rohrer, H.
Date Issued

2011

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
The Japan Society of Applied Physics, The 72nd Fall Meeting

Yamagata, Japan

August 29-September 2, 2011

Available on Infoscience
November 28, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/72849
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés