Highly sensitive membrane-type surface stress sensor (MSS) and its applications
Yoshikawa, G.; Akiyama, Terunobu; Gautsch, Sebastian; Vettiger, Peter; Rohrer, H.
2011

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Title Highly sensitive membrane-type surface stress sensor (MSS) and its applications
Author(s) Yoshikawa, G. ; Akiyama, Terunobu ; Gautsch, Sebastian ; Vettiger, Peter ; Rohrer, H.
Conference International Conference on Advanced Materials and Nanotechnology (ICAMN) , Kathmandu, Nepal, October 21-23, 2011
Date 2011
Laboratories SAMLAB
Record Appears in Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
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