Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Dynamically deformable micromirror array for defined laser beam shaping and homogenizing
 
conference paper

Dynamically deformable micromirror array for defined laser beam shaping and homogenizing

Masson, Jonathan  
•
Bitterli, Roland  
•
Noell, Wilfried  
Show more
2011
Proceedings of 16th International Conference on Optical MEMS and Nanophotonics
Optical MEMS and Nanophotonics (OMN 2011)

We present a dynamic laser beam shaper than can generate smooth flat top and gaussian intensity profiles. It consists of a 100% fill factor membrane, supported by beams or posts, that deforms in a shape similar to a concave linear or 2D microlens array. The dynamic and tunable focal lengths allow to change the diffusion angle or to switch between flat top or gaussian output optical profiles. The whole array is fabricated over a rotating stage that enables the averaging of the interference effects caused by the array. Experiments showed that an angle of only 0.18° smooth the interferences to a contrast of 0.04. Optical simulations were performed to design the device. A first prototype using a magnetic scanner was tested to validate the simulations. Fabrication of the rotating stage and the membrane was accomplished using surface and bulk micromachining using parylene trench refilling.

  • Details
  • Metrics
Type
conference paper
DOI
10.1109/OMEMS.2011.6031058
Web of Science ID

WOS:000297850100001

Author(s)
Masson, Jonathan  
Bitterli, Roland  
Noell, Wilfried  
de Rooij, Nico  
Bich, Andreas
Weible, Kenneth
Voelkel, Reinhard
Date Issued

2011

Publisher

IEEE

Published in
Proceedings of 16th International Conference on Optical MEMS and Nanophotonics
Start page

3

End page

4

Subjects

Beam shaping

•

scanning

•

micromirror

•

parylene

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
Optical MEMS and Nanophotonics (OMN 2011)

Istanbul, Turkey

August 8-11, 2011

Available on Infoscience
November 11, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/72438
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés