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conference paper
Low voltage electrostatic 90° turning flap for reflective MEMS display
2010
Proceedings of International Conference on Optical MEMS and Nanophotonics
A low voltage electrostatically actuated 90° turning flap is modeled and fabricated. The application is a new kind reflective, low-power, MEMS-based display with high contrast and reflectance. The system consists of a poly-silicon flap fabricated onto a silicon substrate with a transparent counter electrode on glass and a device layer of a silicon-on-insulator (SOI) wafer as spacer in between them. Actuation voltages down to 20V are achieved.
Type
conference paper
Authors
Publication date
2010
Publisher
Published in
Proceedings of International Conference on Optical MEMS and Nanophotonics
Start page
77
End page
78
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Sapporo, Japan | August 9-12, 2010 | |
Available on Infoscience
November 11, 2011
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