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  4. Parylene to silicon nitride bonding for post-integration of high pressure microfluidics to CMOS devices
 
research article

Parylene to silicon nitride bonding for post-integration of high pressure microfluidics to CMOS devices

Ciftlik, Ata Tuna  
•
Gijs, Martinus  
2012
Lab on a Chip

High pressure-rated channels allow microfluidic assays to be performed on a smaller footprint while keeping the throughput, thanks to the higher enabled flow rates, opening perspectives for cost-effective integration of CMOS chips to microfluidics circuits. Accordingly, this note introduces an easy, low-cost and efficient method for realizing high pressure microfluidics-to-CMOS integration. First, we report a new low temperature (280 °C) Parylene-C wafer bonding technique, where O2 plasma-treated Parylene-C bonds directly to Si3N4 with an average bonding strength of 23 MPa. The technique works for silicon wafers with nitride surface and uses a single layer of Parylene-C deposited only on one wafer, and allows microfluidic structures to be easily formed by directly bonding to the nitride passivation layer of the CMOS devices. Exploiting this technology, we demonstrated a microfluidic chip burst pressure as high as 16 MPa, while metal electrode structures on the silicon wafer remained functional after bonding.

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Type
research article
DOI
10.1039/c1lc20727j
Web of Science ID

WOS:000298964100023

Author(s)
Ciftlik, Ata Tuna  
Gijs, Martinus  
Date Issued

2012

Publisher

Royal Society of Chemistry

Published in
Lab on a Chip
Volume

12

Issue

2

Start page

396

End page

400

Subjects

Parylene Bonding

•

Parylene to silicon nitride bonding

•

CMOS integration

•

High Pressure Microfluidics

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS2  
Available on Infoscience
November 11, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/72436
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