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conference paper
Parylene to silicon-nitride bonding for easy post-integration of high-pressure microfluidics to CMOS devices
2011
Proceedings of the 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '11)
Type
conference paper
Authors
Publication date
2011
Published in
Proceedings of the 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '11)
Start page
443
End page
445
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Seattle, Washington, USA | October 2-6, 2011 | |
Available on Infoscience
November 11, 2011
Use this identifier to reference this record