Parylene to silicon-nitride bonding for easy post-integration of high-pressure microfluidics to CMOS devices


Published in:
Proceedings of the 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '11), 443-445
Presented at:
15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS '11), Seattle, Washington, USA, October 2-6, 2011
Year:
2011
Keywords:
Laboratories:




 Record created 2011-11-11, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)