Loading...
conference paper
Electrostatic torsional vertical flaps for reflective MEMS display
2011
Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference
A new kind of high contrast, MEMS-based reflective display system is being developed. The system consists of light reflective flaps on an optically absorptive surface. The novelty is that the flaps are in vertical position at their rest state. They can be electrostatically turned to horizontal state. A trench refilling technique on a silicon-on-insulator (SOI) wafer is used to fabricate the torsional polysilicon flaps. Low voltage and low power is required for actuation. With the same process also novel shutter and flap structures can be fabricated.
Type
conference paper
Authors
Publication date
2011
Publisher
Published in
Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference
Start page
2924
End page
2927
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Beijing, China | June 5-9, 2011 | |
Available on Infoscience
November 11, 2011
Use this identifier to reference this record