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conference paper
Vertical Flaps of Arbitrary Shape For Reflective MEMS Displays and Optical Modulators
2011
Proceedings of Optical MEMS & Nanophotonics
A novel technological platform is presented for the fabrication of vertical flaps and gratings of arbitrary shape. The flaps are suspended by torsion beams and actuated electrostatically at voltages as low as 10V. The main application is a high contrast reflective display.
Type
conference paper
Web of Science ID
WOS:000297850100064
Authors
Publication date
2011
Published in
Proceedings of Optical MEMS & Nanophotonics
Start page
155
End page
156
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Istanbul, Turkey | August 8-11, 2011 | |
Available on Infoscience
November 11, 2011
Use this identifier to reference this record