Vertical Flaps of Arbitrary Shape For Reflective MEMS Displays and Optical Modulators
2011
Abstract
A novel technological platform is presented for the fabrication of vertical flaps and gratings of arbitrary shape. The flaps are suspended by torsion beams and actuated electrostatically at voltages as low as 10V. The main application is a high contrast reflective display.
Details
Title
Vertical Flaps of Arbitrary Shape For Reflective MEMS Displays and Optical Modulators
Author(s)
Jutzi, Fabio ; Noell, Wilfried ; de Rooij, Nico
Published in
Proceedings of Optical MEMS & Nanophotonics
Pages
155-156
Conference
Optical MEMS & Nanophotonics, Istanbul, Turkey, August 8-11, 2011
Date
2011
Publisher
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
Keywords
Language
English
Other identifier(s)
View record in Web of Science
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2011-11-11