Vertical Flaps of Arbitrary Shape For Reflective MEMS Displays and Optical Modulators

A novel technological platform is presented for the fabrication of vertical flaps and gratings of arbitrary shape. The flaps are suspended by torsion beams and actuated electrostatically at voltages as low as 10V. The main application is a high contrast reflective display.


Published in:
Proceedings of Optical MEMS & Nanophotonics, 155-156
Presented at:
Optical MEMS & Nanophotonics, Istanbul, Turkey, August 8-11, 2011
Year:
2011
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
Keywords:
Laboratories:




 Record created 2011-11-11, last modified 2018-09-13


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)