Development of Passivated Heterogeneous Metal Nanogaps Using E-Beam Overlay Techniques

• Presented at: Eurosensors XXV, Athens, Greece, September 4-7, 2011
• Published in: Proceedings of Eurosensors XXV, vol. 25, p. 1661-1164
• Series: Procedia Engineering
• Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa, 2011

We present a planar nanogap structure with heterogeneous metal electrodes separated by a distance of tens of nanometers. This asymmetric nanodevice is meant for metal/molecule/metal transport analysis. The heterogeneous aspect of the metal electrodes is meant to trigger the assembly orientation of selected molecules across the gap. With E-beam overlay technique and double-layer passivation, the structure has a well-defined and reproducible gap and shows good chemical durability and dielectric properties. (C) 2011 Published by Elsevier Ltd.s

Keywords: Heterogeneous ; Nanogap ; E-beam lithography ; molecule analysis ; Nm Gaps ; Fabrication ; Electrodes ; Junction

Reference

• EPFL-CONF-170076
• doi:10.1016/j.proeng.2011.12.411
• View record in Web of Science

Record created on 2011-11-10, modified on 2016-08-09