Development of Passivated Heterogeneous Metal Nanogaps Using E-Beam Overlay Techniques

Wu, Yexian; Akiyama, Terunobu; Gautsch, Sebastian; de Rooij, Nico

doi:10.1016/j.proeng.2011.12.411

Development of Passivated Heterogeneous Metal Nanogaps Using E-Beam Overlay Techniques

Wu, Yexian ; Akiyama, Terunobu ; Gautsch, Sebastian ; de Rooij, Nico

We present a planar nanogap structure with heterogeneous metal electrodes separated by a distance of tens of nanometers. This asymmetric nanodevice is meant for metal/molecule/metal transport analysis. The heterogeneous aspect of the metal electrodes is meant to trigger the assembly orientation of selected molecules across the gap. With E-beam overlay technique and double-layer passivation, the structure has a well-defined and reproducible gap and shows good chemical durability and dielectric properties. (C) 2011 Published by Elsevier Ltd.s

Published in:

Proceedings of Eurosensors XXV, 25, 1661-1164

Presented at:

Eurosensors XXV, Athens, Greece, September 4-7, 2011

Year:

2011

Publisher:

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa

Keywords:

Heterogeneous ; Nanogap ; E-beam lithography ; molecule analysis ; Nm Gaps ; Fabrication ; Electrodes ; Junction

DOI:

10.1016/j.proeng.2011.12.411