Development of Passivated Heterogeneous Metal Nanogaps Using E-Beam Overlay Techniques

We present a planar nanogap structure with heterogeneous metal electrodes separated by a distance of tens of nanometers. This asymmetric nanodevice is meant for metal/molecule/metal transport analysis. The heterogeneous aspect of the metal electrodes is meant to trigger the assembly orientation of selected molecules across the gap. With E-beam overlay technique and double-layer passivation, the structure has a well-defined and reproducible gap and shows good chemical durability and dielectric properties. (C) 2011 Published by Elsevier Ltd.s


Published in:
Proceedings of Eurosensors XXV, 25, 1661-1164
Presented at:
Eurosensors XXV, Athens, Greece, September 4-7, 2011
Year:
2011
Publisher:
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa
Keywords:
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 Record created 2011-11-10, last modified 2018-03-17


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