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  4. Direct Piezoresistive Simulation Tool
 
conference poster not in proceedings

Direct Piezoresistive Simulation Tool

Loizeau, Frédéric  
•
Akiyama, Terunobu  
•
Gautsch, Sebastian  
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2011
8th International Workshop on Nanomechanical Sensing 2011

Biosensors often require detecting infinitesimal amount of species, thus their readout must be improved for highest sensitivity and best Signal-to-Noise ratio. We will present a simulation tool for piezoresistive strain sensors, which takes into account nonuniform current flow in e.g., a U-shaped piezoresistor, and calculates local resistivity changes based on the piezoresistive coefficients with corresponding directions. This simulation tool yields DR/R as a result. Thus a real piezoresistor layout, rather than a symbolic resistor, can be simulated. Important aspects of optimum piezoresistive readout for biosensors will be discussed.

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Type
conference poster not in proceedings
Author(s)
Loizeau, Frédéric  
Akiyama, Terunobu  
Gautsch, Sebastian  
Vettiger, Peter
de Rooij, Nico  
Date Issued

2011

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
8th International Workshop on Nanomechanical Sensing 2011

Dublin, Ireland

May 11-13, 2011

Available on Infoscience
November 10, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/72415
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