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  4. 2D Cantilever Array with Fixed Geometries and Varying Spring Constants for Life Science Applications
 
conference paper

2D Cantilever Array with Fixed Geometries and Varying Spring Constants for Life Science Applications

Loizeau, Frédéric  
•
Akiyama, Terunobu  
•
Gautsch, Sebastian  
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2011
Proceedings of Eurosensors XXV
Eurosensors XXV

We present 2D cantilever arrays for parallel AFM and their fabrication process using a silicon nitride cantilever with molded tip as the base element of the array. They are designed either for (i) force indentation onto living cells and stiffness mapping, or (ii) cell-to-cell adhesion test applications. The former needs the cantilevers with 0.03 N/m and the tip radius 50 – 200 nm. The latter requires 3 N/m and 2500 nm, respectively. The technique to fabricate those cantilever arrays with different specifications, without significantly changing the fabrication process, is the core of this work. The parallel AFM system itself has been developed and presented elsewhere (M. Favre, et al., Journal of Molecular Recognition, vol. 24, pp. 446-452, 2011). To obtain cantilevers with different spring constants from a wafer, V-grooves structures along the cantilevers were introduced in the cantilever design. An analytical model and an FEA simulation confirmed that the spring constant can be varied up to two decades by changing the V-groove depth. To obtain a large tip radius required for cell handling, we developed a mold enlarging/rounding step and obtained a tip with a radius up to 4 μm.

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Type
conference paper
DOI
10.1016/j.proeng.2011.12.165
Web of Science ID

WOS:000300512400162

Author(s)
Loizeau, Frédéric  
Akiyama, Terunobu  
Gautsch, Sebastian  
Meister, A.
Vettiger, Peter
de Rooij, Nico  
Date Issued

2011

Publisher

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa

Published in
Proceedings of Eurosensors XXV
Series title/Series vol.

Procedia Engineering

Volume

25

Start page

669

End page

672

Subjects

Cantilever array

•

Silicon nitride molding

•

Stiffening

•

Cell force spectroscopy

•

Cells

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
Eurosensors XXV

Athens, Greece

September 4-7, 2011

Available on Infoscience
November 10, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/72413
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