Ultra-low power palladium-coated MEMS resonators for hydrogen detection under ambient conditions

We present a novel approach for hydrogen gas detection, based on palladium-coated micromechanical resonators. A sequence of thin film technniques allows the large-scale parallel fabrication of free-standing beams separated from a counter-electrode by a mesoscopic air gap. The readout principle has been confirmed. The device manifests a resonance frequency drop from 6.5 to 3 MHz as it is exposed to 4 % of H2 during 15s. The sensor responds within a few seconds to hydrogen gas and has a power consumption of about 10 pW. Preliminary results suggest that this technique can detect very minute concentrations.


Published in:
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International, 787-790
Presented at:
16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Beijing, China, 5-9 June, 2011
Year:
2011
Publisher:
IEEE
ISBN:
978-1-4577-0157-3
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2011-10-17, last modified 2018-09-13

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