30nm Mettalic Slot Array for Sensing: Theoretical and Experimental Study

The simulation, fabrication and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm) are presented [1]. This device is attempting to be a sensor for refractive index variation measurements with theoretically expected sensitivity of 750 nm/RIU (Refractive Index Unit).


Published in:
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics, 27-28
Presented at:
16th International Conference on Optical MEMS and Nanophotonics, Istanbul, Turkey, August 8-11, 2011
Year:
2011
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN:
978-1-4577-0336-2
Keywords:
Laboratories:




 Record created 2011-09-27, last modified 2018-03-17


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