Conference paper

30nm Mettalic Slot Array for Sensing: Theoretical and Experimental Study

The simulation, fabrication and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm) are presented [1]. This device is attempting to be a sensor for refractive index variation measurements with theoretically expected sensitivity of 750 nm/RIU (Refractive Index Unit).


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