Polysilicon Nanowire Transistors and Arrays Fabricated With the Multispacer Technique

In this paper, we demonstrate the ability of the multi- spacer patterning technique to yield layers of polycrystalline silicon nanowires with a sublithographic pitch, by exclusively using micrometer resolution and CMOS processing steps. We characterize single spacers operating as poly-Si nanowire field effect transistors . We demonstrate also the possibility to lay a spacer perpendicularly to a set of parallel spacers in a crossbar fashion. The extrapolated cross-point density from the small 4 × 1-array is in the range of 10 exp10 cm−2 . We discuss the applications of this technique to improve the density of previously reported poly-SiNW memories and as a future framework for nanowire crossbars and decoders. Then we analyze the limitations and costs of the proposed technique.


Published in:
IEEE Transactions on Nanotechnology, 10, 4, 891-899
Year:
2011
Publisher:
Institute of Electrical and Electronics Engineers
ISSN:
1536-125X
Keywords:
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 Record created 2011-08-23, last modified 2018-12-03

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