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research article
Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film
The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.
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Type
research article
Web of Science ID
WOS:000289834500002
Authors
Publication date
2011
Volume
58
Issue
4
Start page
685
End page
688
Subjects
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
August 11, 2011