Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film

The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design.


Published in:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 58, 4, 685-688
Year:
2011
Publisher:
Institute of Electrical and Electronics Engineers
ISSN:
0885-3010
Keywords:
Laboratories:




 Record created 2011-08-11, last modified 2018-03-17


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