Microfabrication of free-standing micro-solid oxide fuel cells on Foturan® and silicon substrates

Due to their high specific energy and energy density, micro-solid oxide fuel cells1,2 (µ-SOFCs) are seen as one of the technologies that could help satisfying the continuously increasing demand for electric energy in portable electronic devices. The µ-SOFC is a less than 1 µm thin free-standing membrane. The membrane consists of ceramic and metallic thin film layers integrated on a micro-structurable substrate based on MEMS technologies. In this study, Foturan® glass ceramic and silicon µ-SOFCs substrates are compared in terms of etching behavior, mechanical and thermomechanical properties

Presented at:
Solid State Ionics (SSI-18), July 3-8, 2011, Warszawa, Poland

 Record created 2011-08-09, last modified 2018-03-18

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