Reliability of micro-hotplates on polyimide foil

We report on the reliability of micro-heating elements made on a polyimide plastic foil. Tests on the maximum power the devices could withstand before failure and their aging when operating continuously at a constant temperature between 200 and 400°C were performed. They demonstrated that the hotplates can operate at continuous elevated temperatures at very low-power for more than a year. The deformation of the hotplate during operation and the failure mechanisms were studied. Such investigation is of interest for the design of robust metal-oxide gas sensors on foil to be directly integrated into smart sensing labels.

Published in:
Proceedings of Transducers’11, 1, 338-341
Presented at:
Transducers’11, Beijing, China, June 5-9, 2011

 Record created 2011-08-09, last modified 2020-07-30

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