Bond-detach lithography: a method for micro/nanolithography by precision PDMS patterning

We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.


Published in:
Small, 3, 1, 132–138
Year:
2007
Publisher:
Wiley-Blackwell
ISSN:
1613-6810
Keywords:
Laboratories:




 Record created 2011-07-04, last modified 2018-03-17


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