Generation of Various Complex Patterned Structures From a Single Ellipsoidal Dot Prepattern by Capillary Force Lithography

Creating many different complex structures from a single prepattern is achieved from either a master mold or stamping onto a solid substrate by patterning with a PDMS replica mold. Various metal patterns including ellipses, dots, rings, chains of dots (or rings), ribbons and wavy lines with various feature sizes can be generated from a single pattern of isolated ellipsoidal dots by simply varying the residual polymer film thickness and the reactive ion etching (RIE) time.


Published in:
Advanced Materials, 19, 24, 4392-4398
Year:
2007
ISSN:
1521-4095
Keywords:
Laboratories:




 Record created 2011-06-06, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)