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research article

Fabrication of Polymer-Based Micro Devices: Formulation and Study of the Paste

Serra, Nathalie  
•
Maeder, Thomas  
•
Gentsch, Olivier
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2011
Sensors and Actuators A: Physical

We investigate in the present work the fabrication of polymer-based micro-fluidic and micro-mechanical devices using sacrificial, resistive/conductive pastes, through a screen-printing process. An organic sacrificial paste is first screen-printed onto a substrate, the future opening in the structure existing where the paste lies (channels, cavities...). Then, a resistive paste based on thermosetting polymer resin and graphite is deposited onto the previous layer. Finally, the sacrificial paste is removed at 150°C by sublimation through the composite, leaving therefore the desired pattern. For such applications, the key is naturally the formulation of the pastes. On a previous work, we already proposed a potential formulation for the organic sacrificial paste, based on polyols [1]. In the present paper, we will focus on the formulation of the cover paste, which must be adapted rheologically for the screen-printing process, but also chemically due to strong potential interactions between the sacrificial layer and the over-layer. Finally, micro-devices such as simple fluidic channels and suspended structures were produced and shown to be operational, demonstrating the high potential of our process.

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2011 Serra S+A - couches sacrificielles sublimables - couverture silicone.pdf

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Preprint

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http://purl.org/coar/version/c_71e4c1898caa6e32

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openaccess

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354.8 KB

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a021851dde34a857c21ce9f8cf3102e8

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