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research article
3D Assembly Using Au-Si Eutectic and Au-Au Thermocompression Wafer Level Bonding for M(O)EMS Device Fabrication
2010
Type
research article
Authors
Publication date
2010
Published in
Volume
33
Issue
4
Start page
37
End page
46
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
February 16, 2011
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