Integrated planar fluxgate sensor

Planar magnetic sensor, made in particular via CMOS techniques on a semiconductor substrate (1) of for example parallelepiped shape. It includes an amorphous ferromagnetic core (10) in the shape of a Greek cross which occupies the two diagonals of the square defined by the outer contour (90) of the excitation coil (9), the latter being made in the form of a planar winding of square shape. One thus measures, via flat detection coils (70, 80 and 71, 81) which are mounted in series and in a differential arrangement, the two orthogonal components (H1, H2) of the external magnetic field (Hext).

Other identifiers:
EPO Family ID: 34524882
EPO Family ID: 8238164

Note: The status of this file is: EPFL only

 Record created 2011-02-15, last modified 2018-03-17

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