An integrated micro-Hall probe for scanning magnetic microscopy

Anewmicrosystem with the ability to detect magnetic microstructures based on the non-invasive Hall principle is presented. The micro-Hall plate embedded in the microsystem and scaled down to the physical limits of the employedCMOStechnology has an active area of only 2.4um×2.4um. The microsystem exhibits an output sensitivity of 7.5 V/T in perpendicular direction to the chip surface and a magnetic field resolution of 300 nT/√Hz at 1 Hz. A two-dimensional magnetic scanner was developed to demonstrate the performances of the developed microsystem.


Published in:
Sensors and Actuators A, 129, 212-215
Year:
2006
Publisher:
Elsevier
ISSN:
0924-4247
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2011-02-15, last modified 2018-09-13

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