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  4. The photolytic laser chemical vapor deposition rate of platinum, its dependence on wavelength, precursor vapor pressure, light intensity, and laser beam diameter
 
research article

The photolytic laser chemical vapor deposition rate of platinum, its dependence on wavelength, precursor vapor pressure, light intensity, and laser beam diameter

Braichotte, D.
•
Garrido, C.
•
Van den Bergh, H.  
1990
Applied Surface Science

The rate of photolytic laser chem. vapor deposition (LCVD) of Pt from its bishexafluoroacetylacetonate precursor is measured as a function of the light intensity, the wavelength, the precursor pressure, and the laser beam diam. at the surface. The wavelength dependence of the deposition rate indicates that the photodissocn. yield does not depend only on the absorption coeff. of the precursor, but may differ from one absorption band to another. This is indicative of the different photophys. processes assocd. with different absorption bands. Changing the precursor pressure strongly influences gas-phase LCVD, and hardly influences adlayer LCVD at the applied conditions. Effective quantum yields for the LCVD process are calcd. using simple models for photolysis in the gas phase and in the adlayer. The magnitude of these quantum yields, as well as their dependence on light intensity and precursor vapor pressure is compared with expt. A simple model is used to est. the height above the surface which contributes effectively to gas-phase LCVD.

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Type
research article
DOI
10.1016/0169-4332(90)90113-E
Author(s)
Braichotte, D.
Garrido, C.
Van den Bergh, H.  
Date Issued

1990

Published in
Applied Surface Science
Volume

46

Issue

1-4

Start page

9

End page

18

Subjects

7440-06-4P (Platinum) Role: PREP (Preparation) (laser photochem. vapor deposition of

•

from bishexafluoroacetylacetonate precursor); 65353-51-7 (Platinum bishexafluoroacetylacetonate) Role: RCT (Reactant)

•

RACT (Reactant or reagent) (laser photolysis of

•

laser deposition platinum; photolysis fluoroacetylacetonate platinum vapor deposition

Note

Copyright 2003 ACS

CAPLUS

AN 1991:91713

CAN 114:91713

74-1

Radiation Chemistry, Photochemistry, and Photographic and Other Reprographic Processes

66

Lab. CHim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:

Journal

ASUSEE

written in English.

Photolysis (laser-induced, of platinum bishexafluoroacetylacetonate, in vapor deposition of platinum)

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPAS  
Available on Infoscience
February 1, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/63675
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