Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
1987
Abstract
The laser chem. vapor deposition of platinum from its bishexafluoroacetylacetonate deriv. is studied with a cw Ar ion laser at 458 and 514 nm. The height, the width, as well as the elec. cond. of the deposited stripes are reported as a function of the vapor pressure of the metalorg. precursor, the laser intensity, and the writing speed.
Details
Title
Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
Author(s)
Braichotte, D. ; Van den Bergh, H.
Published in
Applied Physics A
Volume
44
Issue
4
Pages
353-359
Date
1987
Keywords
Note
Copyright 2003 ACS
CAPLUS
AN 1988:141344
CAN 108:141344
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
Journal
APSFDB
written in English.
Photolysis (of platinum bis(hexafluoroacetylacetonate) complex, in chem. vapor deposition of platinum contacts); Electric contacts (platinum, by laser photolysis of hexafluoroacetylacetonate complex)
CAPLUS
AN 1988:141344
CAN 108:141344
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
Journal
APSFDB
written in English.
Photolysis (of platinum bis(hexafluoroacetylacetonate) complex, in chem. vapor deposition of platinum contacts); Electric contacts (platinum, by laser photolysis of hexafluoroacetylacetonate complex)
Laboratories
LPAS
Record Appears in
Scientific production and competences > ENAC - School of Architecture, Civil and Environmental Engineering > ENAC Archives > LPAS - Air and Soil Pollution Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2011-02-01