Laser induced chemical vapor deposition of metals for electrical contacts in semiconductor processing

Pyrolytic and photolytic laser chem. vapor deposition of Cu, Pt, Ga, and Sn was studied for the prodn. of low-resistance ohmic contacts of very small dimensions.


Published in:
Integrated Optics, 48, 38-43
Year:
1985
ISBN:
9783662135716
Keywords:
Note:
Copyright 2003 ACS
CAPLUS
AN 1985:497072
CAN 103:97072
76-2
Electric Phenomena
Inst. Chim. Phys.,Ec. Polytech. Fed. (ETH),Lausanne,Switz. FIELD URL:
Journal
SSOSDB
written in English.
Metals Role: DEV (Device component use), PEP (Physical, engineering or chemical process), TEM (Technical or engineered material use), PROC (Process), USES (Uses) (chem. vapor deposition of, laser-induced, for elec. contacts in semiconductor devices); Semiconductor devices (laser-induced chem. vapor deposition of elec. contacts for); Electric contacts (laser-induced chem. vapor deposition of, for semiconductor devices)
Laboratories:




 Record created 2011-02-01, last modified 2018-01-28


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