Structure of platinum and tin films formed by laser-induced chemical vapor deposition

Similarities and differences in the structure and shape of the metallic deposit were studied for photolytic and pyrolytic laser-induced chem. vapor deposition of Sn and Pt. The photolytically deposited thin metallic films appear to be more homogeneous and tend to be amorphous. The pyrolytically deposited films are polycryst. and are more irregular, in particular in the case of Sn where the hot drop-like particles coalesce on the surface yielding a microscopic deposit of quite varied sizes and shapes.


Editor(s):
Bäuerle, Dieter
Published in:
Laser Processing and Diagnostics, 183-187
Year:
1984
Publisher:
Berlin, Springer
ISBN:
978-3-642-82383-1
Keywords:
Note:
Copyright 2003 ACS
CAPLUS
AN 1985:54136
CAN 102:54136
75-2
Crystallography and Liquid Crystals
76
Inst. Chim. Phys.,Ec. Polytech. Fed.,Lausanne,Switz. FIELD URL:
Journal
SSCPDA
written in English.
Laser radiation (structure of platinum and tin films from chem.-vapor deposition induced by)
Laboratories:




 Record created 2011-02-01, last modified 2018-01-28


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