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conference paper
Parylene-based uncooled thermomechanical array
2009
Proceedings of SPIE
Type
conference paper
Authors
Publication date
2009
Publisher
Published in
Proceedings of SPIE
Start page
72980H
End page
72980H
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place |
Orlando, FL, USA | |
Available on Infoscience
January 21, 2011
Use this identifier to reference this record