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conference paper
Parylene-based uncooled thermomechanical array
2009
Proceedings of SPIE
Use this identifier to reference this record
Type
conference paper
Authors
Publication date
2009
Publisher
Published in
Proceedings of SPIE
Start page
72980H
End page
72980H
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place |
Orlando, FL, USA | |
Available on Infoscience
January 21, 2011