Details
Title
Parylene-based uncooled thermomechanical array
Author(s)
Ferhanoglu, Onur ; Toy, M. Fatih ; Urey, Hakan
Published in
Proceedings of SPIE
Pages
72980H-72980H-8
Conference
Infrared Technology and Applications XXXV, Orlando, FL, USA
Date
2009
Publisher
SPIE
ISSN
1996-756X
Laboratories
IMT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > IMT - Institute of Microengineering
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2011-01-21