MOEMS thermal imaging camera

A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.


Published in:
Prime: 2008 Phd Research In Microelectronics And Electronics, Proceedings, 101-104
Presented at:
Conference on PhD Research in Microelectronics and Electronics, Istanbul, TURKEY, Jun 22-25, 2008
Year:
2008
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
Laboratories:




 Record created 2011-01-21, last modified 2018-03-17


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