Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Two-wavelength grating interferometry for MEMS sensors
 
research article

Two-wavelength grating interferometry for MEMS sensors

Ferhanoglu, Onur
•
Toy, M. Fatih  
•
Urey, Hakan
2007
Ieee Photonics Technology Letters

Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited subnanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 mu m assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.

  • Details
  • Metrics
Type
research article
DOI
10.1109/LPT.2007.908450
Author(s)
Ferhanoglu, Onur
Toy, M. Fatih  
Urey, Hakan
Date Issued

2007

Publisher

Institute of Electrical and Electronics Engineers

Published in
Ieee Photonics Technology Letters
Volume

19

Start page

1895

End page

1897

Subjects

grating interferometry

•

micro-electro-mechanical-systems (MEMS)

•

optical sensing

•

two-wavelength interferometry

•

Phase-Shifting Interferometry

•

Readout

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
IMT  
Available on Infoscience
January 21, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/63217
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés