conference paper
Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization
2010
Proceedings of PowerMEMS 2010
Type
conference paper
Author(s)
Sambri, A.
Gariglio, G.
Triscone, J.-M.
Guy, F.
Reiner, J. W.
Ahn, C. H.
Date Issued
2010
Published in
Proceedings of PowerMEMS 2010
Volume
1
Start page
203
End page
206
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Leuven, Belgium | Nov 30-Dec 3, 2010 | |
Available on Infoscience
January 13, 2011
Use this identifier to reference this record