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conference paper
Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization
2010
Proceedings of PowerMEMS 2010
Type
conference paper
Authors
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•
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Sambri, A.
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Gariglio, G.
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Triscone, J.-M.
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Guy, F.
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Reiner, J. W.
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Ahn, C. H.
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Publication date
2010
Published in
Proceedings of PowerMEMS 2010
Volume
1
Start page
203
End page
206
Peer reviewed
NON-REVIEWED
EPFL units
| Event name | Event place | Event date |
Leuven, Belgium | Nov 30-Dec 3, 2010 | |
Available on Infoscience
January 13, 2011
Use this identifier to reference this record