Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization
2010
Details
Title
Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization
Author(s)
Isarakorn, D. ; Briand, D. ; Janphuang, P. ; Sambri, A. ; Gariglio, G. ; Triscone, J.-M. ; Guy, F. ; Reiner, J. W. ; Ahn, C. H. ; de Rooij, N.
Published in
Proceedings of PowerMEMS 2010
Volume
1
Pages
203-206
Conference
PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010
Date
2010
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2011-01-13