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Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization

Isarakorn, D. ; Briand, D. ; Janphuang, P. ; Sambri, A. ; Gariglio, G. ; Triscone, J.-M. ; Guy, F. ; Reiner, J. W. ; Ahn, C. H. ; de Rooij, N.

Published in:
Proceedings of PowerMEMS 2010, 1, 203-206
Presented at:
PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010
Year:
2010
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published



 Record created 2011-01-13, last modified 2020-10-24


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