Energy harvesting MEMS device based on an epitaxial PZT thin film: fabrication and characterization


Published in:
Proceedings of PowerMEMS 2010, 1, 203-206
Presented at:
PowerMEMS 2010, Leuven, Belgium, Nov 30-Dec 3, 2010
Year:
2010
Laboratories:




 Record created 2011-01-13, last modified 2018-03-17


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