Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
2010
Details
Title
Measuring amplitude and phase of light emerging from microstructures with the high resolution interference microscope
Author(s)
Kim, Myun Sik ; Scharf, Toralf ; Herzig, Hans Peter
Conference
8th Fraunhofer IISB Lithography Simulation Workshop, Hersbruck, Germany, September 23-25, 2010
Date
2010
Laboratories
OPT
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2010-12-13