Ultra-low pressure sensor for neonatal resuscitator
A Venturi-type flow sensor has been designed and fabricated for neonatal respiratory assistance to control airway pressure and tidal volume. As the low flow range and sensing principle require the measurement of correspondingly very low pressures, a very responsive sensor, based on a polymer membrane acting onto a piezoresistive cantilever force sensor based on low-temperature co-fired ceramic (LTCC), was developed. This paper details the 3D modelling, manufacture, assembly and characterisation of the sensor. Compared to expensive and fragile MEMS-based devices, this sensor, based on LTCC, thick-film technology and polymer parts, provides an accurate and robust, yet low-cost alternative. Keywords: pressure sensor; Venturi flow sensor; LTCC; thick-film technology.
2010 Jacq Eurosensors Linz 3105 - capteur débit-pression venturi ULOPS - article perso_1.pdf
Postprint
openaccess
665.76 KB
Adobe PDF
e5fa11cc0c41722ab1ec73198167aa23
2010 Jacq Eurosensors Linz 3105 - capteur débit-pression venturi ULOPS - présentation.pdf
openaccess
1.85 MB
Adobe PDF
9ab71e7b3b7338184b65f9f99a299610