Conference paper

Fabrication of slot waveguide cavity for sensing application

The fabrication of a slot waveguide cavity oriented to sensing application is demonstrated. The choice of materials and the development of the process flow steps, including E-beam lithography (EBL) and metal lift-off of a single thin layer, are illustrated and discussed to obtain 30 nm width slots in a thin gold layer.

    Keywords: sensing application


    • EPFL-CONF-161531

    Record created on 2010-12-08, modified on 2017-05-10


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