Fabrication of slot waveguide cavity for sensing application

The fabrication of a slot waveguide cavity oriented to sensing application is demonstrated. The choice of materials and the development of the process flow steps, including E-beam lithography (EBL) and metal lift-off of a single thin layer, are illustrated and discussed to obtain 30 nm width slots in a thin gold layer.


Presented at:
EOS Topical Meeting on Nanophotonics and Metamaterials, Paris, France, October 26-29, 2010
Year:
2010
ISBN:
978-3-00-030509-2
Keywords:
Laboratories:


Note: PRIVATE


 Record created 2010-12-08, last modified 2018-09-25

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