Fabrication of slot waveguide cavity for sensing application
The fabrication of a slot waveguide cavity oriented to sensing application is demonstrated. The choice of materials and the development of the process flow steps, including E-beam lithography (EBL) and metal lift-off of a single thin layer, are illustrated and discussed to obtain 30 nm width slots in a thin gold layer.
Keywords: sensing application
Record created on 2010-12-08, modified on 2016-08-09