The long term performance of micro-/nano-electromechanical systems (MEMS/NEMS) depends on their stability to operating conditions, contact friction, adhesion, and wear. Aluminum (Al) substrates have been chemically reacted with perfluorodecanoic acid (PFDA) to form a self-assembled monolayer (SAM) and their surface properties (chemical composition, roughness, friction, and adhesion) characterized by X-ray photoelectron spectroscopy (XPS), contact angle measurement (CAM), and atomic force microscopy (AFM). In addition, stability of the PFDA/Al SAM films have been tested via exposure to corrosive conditions (aqueous solutions of low pH and different temperatures) for various periods of time. The sessile drop static contact angle of pure water demonstrates that PFDA/Al is extremely hydrophobic, giving values typically > 125 degrees compared to that of < 10 degrees for unmodified A]. A systematic comparison of stability between SAM films formed by reaction of Al with perfluorodecylphosphonic acid (PFDP), octadecylphosphonic acid (ODP), and perfluorodecyl-dimethylchlorosilane (PFMS) shows PFDA/Al to be less stable than PFDP/Al and ODP/Al, but more stable than PFMS/Al. (c) 2008 Elsevier B.V. All rights reserved.