Ion-implanted compliant electrodes used in dielectric electroactive polymer actuators with large displacement

Metal ion implantation is shown here as an effective technique to fabricate highly compliant electrodes at room temperature on polymer substrates. By implanting 5 keV gold ions in polydimethylsiloxane we have fabricated micron-scale electrodes that conduct at 175% strain, have low surface resistance (< 1 k Omega/square) and negligible thickness (50 nm). These electrodes have been cycled over 10(5) times to 30% strain with minimal change in electrical characteristics, and find applications in flexible electronics, polymer sensors and actuators. Using these ion-implanted electrodes, we have fabricated arrays of mm-size dielectric electroactive polymer actuators capable of out-of-plane deflection up to 25% with excellent stability.

Published in:
Proceedings Of The Eurosensors Xxiii Conference, 1, 702-705
Presented at:
23rd Eurosensors Conference, Lausanne, SWITZERLAND, Sep 06-09, 2009
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa

 Record created 2010-11-30, last modified 2018-09-13

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