Vibration Energy Harvesting with PZT Micro Device
A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped with interdigitated electrodes to achieve higher voltages. A coupling constant k(2)=5% was derived from the difference in resonance frequencies at low and high impedance. At optimal load impedance, a voltage of 1.6 V and an output power of 1.4 mu W was measured with a 0.8x1.2 mm cantilever having an active area of 0.8x0.4 mm, excited with 2g at 870 Hz.
WOS:000275995600077
2009
Procedia Chemistry
1
1191
1194
REVIEWED
Event name | Event place | Event date |
Lausanne, SWITZERLAND | Sep 06-09, 2009 | |